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AssigneeSchlumberger Technologies, Inc.
InventorsPaul J. Duval, Anastasia Y. Tyurina, Neal T. Sullivan
Estimating the term…
An apparatus for imaging the surface of a sample, such as a scanning electron microscope. The apparatus generates a beam of charged particles directed at the surface, and includes an objective lens and an electrostatic lens for controlling the particle beam. The objective lens and the electrostatic lens constitute a compound lens that has an axis. The beam is controlled so that it travels along the axis of the compound lens in order to avoid adverse consequences induced by, for example, mechanical misalignments and as manifested when the focus of one of the objective and electrostatic lenses is changed during operation of the apparatus.
A method for imaging a surface of a sample with an apparatus which directs a beam of charged particles at the surface and includes an objective lens and an electrostatic lens for controlling the particle beam to minimize at least one adverse effect induced by changes in operating parameters of the apparatus, the objective and electrostatic lenses forming a compound lens having an axis, comprising:
Apparatus for imaging a surface of a sample with a beam of charged particles directed at the sample surface and having an objective lens and an electrostatic lens for controlling the particle beam to minimize at least one adverse effect induced by changes in operating parameters of the apparatus, the objective and electrostatic lenses forming a compound lens having an axis, comprising:
Apparatus for controlling a beam of charged particles used in a machine that images a surface of a sample by directing the particle beam at the surface sample, and which includes an objective lens and an electrostatic lens forming a compound lens having an axis, the particle beam being controlled to minimize at least one adverse effect induced by changes in machine operating parameters, comprising:
Apparatus for controlling a beam of charged particles used in a machine that images a surface of a sample by directing the particle beam at the surface sample, and which includes a plurality of lenses forming a compound lens having an axis, the particle beam being controlled to minimize at least one adverse effect induced by changes in machine operating parameters, comprising:
Apparatus for controlling a beam of charged particles used in a machine that images a surface of a sample by directing the particle beam at the surface sample, and which includes a plurality of lenses forming a compound lens having an axis, the particle beam being controlled to minimize at least one adverse effect induced by changes in machine operating parameters, comprising:
A method for imaging a surface of a sample with an apparatus which directs a beam of charged particles at the surface and includes a plurality of lenses within a column for controlling the particle beam to minimize at least one adverse effect induced by changes in operating parameters of the apparatus, the plurality of lenses forming a compound lens having an axis, comprising:
Dependencies are inferred from the claim text.