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US 2003/0201000 A1Published application
Spray member and method for using the same
AssigneeMicell Technologies, Inc.
InventorsSteven Lee Worm, Michael E. Cole
Life of this patent
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Abstract
A process chamber assembly for use with a substrate and a flow of process fluid includes a vessel and a spray member. The vessel defines a chamber. The spray member includes at least one spray port formed therein adapted to distribute the flow of process fluid onto the substrate in the chamber. The spray member is operative to rotate about a rotational axis relative to the vessel responsive to a flow of the process fluid out of the spray member through the at least one spray port.
Claims6
A method of applying a process fluid to a substrate, the method comprising:
- a) placing the substrate in a chamber of a vessel;
- b) providing a spray member including at least one spray port formed therein;
- c) distributing the process fluid from the at least one spray port onto the substrate;
- and
- d) rotating the spray member about a rotational axis relative to the vessel by flowing the process fluid out of the spray member through the at least one spray port.
2 more elements
Dependencies are inferred from the claim text.