Methods of patterning radiation, methods of forming radiation-patterning tools, and radiation-patterning tools

A method of patterning radiation comprising simultaneously passing the radiation through a first material structure and at least one second material subresolution assist feature proximate the first material structure;

• the first material structure defining a pattern of radiation intensity;
• the second material being different than the first material and altering the pattern of radiation intensity relative to a pattern of radiation intensity that would be defined by the first material structure in the absence of the subresolution assist feature.

A method of forming a radiation-patterning tool, comprising:

• forming a structure over a substrate, the structure being configured to attenuate a portion of radiation passing through the substrate to define a pattern of radiation intensity;
• and
• forming at least one subresolution assist feature proximate the structure to modify the pattern of radiation intensity, the subresolution assist feature comprising a material that is transmissive of at least a portion of the radiation.

A method of forming a radiation-patterning tool, comprising:

• forming a first material structure over a substrate, the first material structure being configured to attenuate a portion of radiation passing through the substrate to define a pattern of radiation intensity;
• and
• forming at least one second material subresolution assist feature joined to the substrate and proximate the first material structure, the second material being different than the first material and attenuating the radiation differently than the first material to modify the pattern of radiation intensity.