Cassette pod stage equipped with locked guide pins
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChih-Pen Yen, Jenq-Yann Tsay, Ta-Chin Lee, Jeng-Chiang Chuang, Yung-Mao Hsu
Life of this patent
Estimating the term…
Loading patent…
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChih-Pen Yen, Jenq-Yann Tsay, Ta-Chin Lee, Jeng-Chiang Chuang, Yung-Mao Hsu
Estimating the term…
A cassette pod stage that is equipped with locked guide pins is described. The cassette pod stage of the present invention is provided with at least one aperture therethrough for engaging at least one guide pin. The guide pin is provided with a top portion, a bottom portion and a skirt portion in-between the top portion and the bottom portion for use as a stop during installation of the guide pin through an aperture in the cassette pod stage. The bottom portion of the guide pin is provided with a threaded portion for engaging a locking nut after the guide pin is installed with the threaded portion extending beyond the bottom surface of the cassette pod stage for such engagement.
A cassette pod stage equipped with locked guide pins comprising:
Dependencies are inferred from the claim text.