Apparatus and method for developing an LCD
OwnerYong-Seok Park, Jum-Lyul Haninventors
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Abstract
Provided are an apparatus and method for developing a large-sized liquid crystal display. The apparatus includes a bar-shaped developer spraying nozzle and a bar-shaped developer removing nozzle. The bar-shaped developer spraying nozzle is installed at a predetermined distance from a substrate and sprays a developer on the substrate. The bar-shaped developer removing nozzle is kept at a predetermined distance from a side of the developer spraying nozzle, collects the developer sprayed from the developer spraying nozzle in a vacuum state, and removes the sprayed developer. Accordingly, the apparatus and method can be applied to a rinsing process, a stripping process, a developing process, and an etching process.
Claims8
An apparatus for developing a liquid crystal display, the apparatus comprising:
- a bar-shaped developer spraying nozzle that is installed at a predetermined distance from a substrate and sprays a developer on the substrate;
- and
- a bar-shaped developer removing nozzle that is kept at a predetermined distance from a side of the developer spraying nozzle, collects the developer sprayed from the developer spraying nozzle in a vacuum state, and removes the sprayed developer.
A method of developing a liquid crystal display, the method comprising:
- (a) mounting a substrate that is completely exposed on a chuck of a liquid crystal display developing apparatus;
- (b) spraying a developer on the substrate using a developer spraying nozzle that is installed at a predetermined distance from the substrate;
- and
- (c) collecting the sprayed developer in a vacuum state using a developer removing nozzle that is kept at a predetermined distance from a side of the developer spraying nozzle and removing the collected developer.
Dependencies are inferred from the claim text.