Vision system
AssigneeApplied Material, Inc.
InventorsIraj Sadighi, Jeff Hudgens, Michael Rice, Gary Wyka
Life of this patent
Estimating the term…
Abstract
Generally a method and apparatus for viewing images within a processing system is provided. In one embodiment, an apparatus includes a plate having a camera, transmitter and battery coupled thereto. The plate is adapted to be transported about a semiconductor processing system by a substrate transfer robot thereby allowing images within the system to be viewed remotely from the system. The viewed images may be used for system inspection and calibration of robot position, among other uses.
Claims79
Apparatus comprising:
- a plate adapted to be transported about a semiconductor processing system by a substrate transfer robot;
- a camera coupled to the plate;
- a transmitter coupled to a first side of the plate for generating a signal indicative of objects viewed of the camera;
- and
- a battery coupled to the plate for powering the transmitter.
A vision system for a semiconductor processing system comprising:
- at least one robot adapted for use in a semiconductor processing system;
- an end effector coupled to the robot;
- a camera selectively positioned by the robot;
- a transmitter coupled to the camera;
- and
- a receiver for receiving images transmitted by the camera.
A system for obtaining a view within a semiconductor processing system comprising:
- a robot having a body and an end effector coupled by a linkage;
- a camera coupled to the linkage;
- and
- a reflector coupled to the end effector and adapted to direct a view obtained by the camera.
A method for obtaining a view of an interior of a semiconductor processing system, the method comprising:
- moving camera using a robot disposed in a semiconductor processing system;
- transmitting images captured by the camera;
- and
- remotely receiving the captured images.
A method for obtaining a reference coordinates of a robot disposed in a semiconductor processing system, the method comprising:
- positioning a camera on a robot;
- viewing a target with a camera;
- and
- determining a relative distance between an image of the target and a predefined position.
A method for viewing an interior of a processing system, the method comprising:
- positioning a camera on a robot;
- moving the camera within the processing system;
- and
- transmitting images viewed by the camera to a controller.
A method for obtaining a view of an interior of a semiconductor processing system, the method comprising:
- moving camera using a robot disposed in a semiconductor processing system;
- capturing one or more images with the camera;
- transmitting the captured images;
- receiving the captured images;
- and
- interpreting the captured images.
Dependencies are inferred from the claim text.