Flexure with integral actuator

#The present invention generally relates to micro-electro-mechanical devices, and more particularly to a micro-electro-mechanical flexure having an integrally formed actuator for bending the flexure.

#Micro-electro-mechanical systems (hereinafter “MEMS”) are integrated systems of small size where the feature sizes are generally of micron dimensions. MEMS devices are created on a common silicon substrate utilizing microfabrication technology like that used for integrated circuit (IC) processing. The fabrication processes selectively etch away parts of the silicon wafer or add new structural layers to form the mechanical and electro-mechanical devices.

#One unique feature of MEMS is the extent to which actuation, sensing, control, manipulation, and computation are integrated into the same system. Examples of MEMS devices include individually controlled micro-mirrors used in a projection display, accelerometers that sense a crash condition and activate airbags in cars, pressure sensors, “lab on a chip” systems, and data storage devices.

#FIG. 1 is a perspective view of one embodiment of the inventive flexure.

#FIG. 2 is a top plan view of the embodiment of the inventive flexure shown in FIG. 1.

#FIG. 3 is a greatly enlarged view of the circled portion 3 of FIG. 1.

#In the following detailed description of the preferred embodiments, reference is made to the accompanying drawings which form a part hereof, and in which is shown by way of illustration specific embodiments in which the invention may be practiced. It is to be understood that other embodiments may be utilized and structural or logical changes may be made without departing from the scope of the present invention. The following detailed description, therefore, is not to be taken in a limiting sense, and the scope of the present invention is defined by the appended claims.

#One embodiment of a flexure 10 for use in a micro-electro-mechanical system (MEMS) is shown in FIGS. 1-3. The flexure 10 includes a compliant longitudinal beam 12 having a first side 14 and a second side 16 opposite first side 14. An actuator 18 is integrally formed with beam 12. The actuator 18 may be selectively activated to flex beam 12. In use, flexure 10 may, for example, be positioned to interact with a movable mass (not shown), such that flexing of beam 12 by actuator 18 moves the moveable mass.

#As shown in FIGS. 1 and 2, actuator 18 is integrally formed as part of a central section 20 of beam 12. However, actuator 18 may be positioned along any portion of the length of beam 12 (such as adjacent an end 23 of beam 12), or along the entire length of beam 12, as is required for a particular application. The end sections 21 of beam 12 may be of any length appropriate for the flexures intended use. The dimensions of the embodiment of invention shown in FIGS. 1-3 should not be construed as limiting with regard to the dimensions and positioning of actuator 18.