Back to results
US 2003/0196755 A1Published application
Confinement ring support assembly
AssigneeLam Research Corporation
InventorJerrel K. Antolik
Life of this patent
Estimating the term…
Loading patent…
Loading patent…
AssigneeLam Research Corporation
InventorJerrel K. Antolik
Estimating the term…
A confinement ring support assembly for coupling together a plurality of confinement rings in a plasma processing chamber. The confinement ring support assembly includes a post having first end and a second end. The post further includes a first lip having an associated first sliding surface, and a second lip having an associated second sliding surface. The first lip is disposed at a first position on the post, the second lip being disposed at a second position at a different arc relative to the first location on the post, the second position being disposed between the first position and the first end along a longitudinal axis of the post. The confinement ring support assembly further includes a first washer configured to move slidably from the first lip past the second lip toward the first end of the post. The first washer has a first cut formed in its interior opening that is configured to engage with the first lip to prevent the first washer from sliding past the first lip in a direction away from the first end and to engage with the first sliding surface associated with the first lip to constrain a rotational movement of the first washer as the washer moves longitudinally along the post.
A confinement ring support assembly for coupling together confinement rings in a plasma processing chamber, comprising:
A confinement ring assembly for use in a plasma processing chamber, comprising:
A plasma processing system having a plasma processing chamber, comprising:
26 A confinement ring support assembly for coupling together a plurality of confinement rings, said confinement rings being configured for use in a plasma processing chamber, comprising:
The confinement ring support assembly of claim 26 wherein said post further includes a first sliding surface extending from said first lip toward said first end of said post, said first cut being configured to mate with said first sliding surface when said first washer slides along said longitudinal axis toward said first end of said post to constrain an angular movement of said first washer.
The confinement ring support assembly of claim 26 wherein said post is configured to be disposed through at least two confinement rings of said plurality of confinement rings, said at least two confinement rings including a first confinement ring and a second confinement ring, said post being configured to be disposed through a first through hole in said first confinement ring and a second through hole in said second confinement ring, said first through hole and said second through hole being substantially similar in shape and size.
Dependencies are inferred from the claim text.