Batch furnace isolation gate

A processing system comprising:

• a process chamber;
• and
• an apparatus mounted on said processing system for isolating said process chamber, the apparatus including:
• a gate member defining a second opening, said second opening substantially concentric with a first opening on said process chamber;
• and
• a door defining a third opening, said door configured to be slidable from a first position where said third opening is substantially concentric with said first opening and said second opening and a second position where said door provides a closure to said first and second openings.

A method for heating a plurality of substrates, the method comprising:

• moving a door of an isolation gate to a first position to provide access to a process chamber for a plurality of substrates;
• moving said substrates into said process chamber for processing and out from said process chamber upon completion of said processing;
• and
• moving said door of said isolation gate to a second position to provide closure to said process chamber.

A processing system comprising:

• a process chamber defining a process chamber opening;
• and
• an apparatus for isolating said process chamber, the apparatus including:
• a gate member enclosed in a frame structure, said gate member defining a first opening on a portion of said gate member, said gate member mounted to said process chamber such that said first opening and said process chamber opening are substantially concentric;
• and
• a door including a first door portion defining a second opening and a second door portion absent an opening, said door configured to be moveable from a first position, where said first door portion is moved over said process chamber opening until said second opening is substantially concentric with said first opening and said process chamber opening to provide access to said process chamber, to a second position, where said second door portion is moved over said first opening and said process chamber opening to provide a closure for said first opening and said process chamber opening.