Measurement box
AssigneeNanophotonics AG
InventorMichael Abraham
Life of this patent
Estimating the term…
Abstract
A measurement box which can be integrated into existing wafer processing equipment. The measurement box comprises an enclosure which contains a measurement module for measuring objects such as the surfaces of wafers. The measurement module is equipped with a miniaturized measuring device and has a displaceable measuring head and a plane table with a rotatable wafer holder. The enclosure has at least one loading opening for the wafer to pass through as well as a ventilation device.
Claims8
Measurement box with an enclosure in which is arranged a measurement module for measuring particularly the surface of wafers, having a displaceable measuring head that is equipped with a miniaturized measuring device, and a plane table with a rotatable wafer support, wherein the enclosure has at least one loading opening (15) for wafers (8) to pass through, as well as a ventilation device.
Dependencies are inferred from the claim text.