Embedded hermetic cavity formation in low temperature cofired ceramic
AssigneeHarris Corporation
InventorsBrian R. Smith, Randy T. Pike, C. Michael Newton
Life of this patent
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Abstract
A method for forming a low temperature cofired ceramic (LTCC) device includes forming a channel in a first LTCC tape layer. A wax is inserted in the channel. The wax is of a type that bums out at a temperature below a sintering temperature of the first LTCC tape layer. At least a second LTCC tape layer is stacked on the first LTCC tape layer to form a stack. The stack is pressed sufficiently for the first and second layers to bond into a laminate. The laminate is fired at the sintering temperature to form a sintered ceramic structure from the first and second LTCC tape layers, so that all or substantially all of the wax is burned out from the channel.
Claims25
A method for forming a low temperature cofired ceramic (LTCC) device, comprising the steps of:
- (a) forming a channel in at least a first LTCC tape layer;
- (b) inserting a wax in the channel, the wax being of a type that burns out at a temperature below a sintering temperature of the first LTCC tape layer;
- (c) stacking at least a second LTCC tape layer on the first LTCC tape layer to form a stack;
- (d) pressing the stack sufficiently for the first and second layers to bond into a laminate;
- and
- (e) firing the laminate at the sintering temperature to form a sintered ceramic structure from the first and second LTCC tape layers, whereby all or substantially all of the wax is burned out from the channel.
A method for forming a device, comprising the steps of:
- (a) forming a channel in at least a first tape layer;
- (b) inserting a meltable material in the channel;
- (c) stacking at least a second tape layer on the first tape layer;
- (d) pressing the first and second tape layers sufficiently to form a laminate;
- and
- (e) removing all or substantially all of the meltable material from the channel.
A method for forming a device, comprising the steps of:
- (a) forming a channel in a first LTCC tape;
- (b) inserting a material in the channel, the material selected from the group consisting of a wax, polyethylene, polystyrene, polypropylene, paraffin and combinations thereof;
- (c) stacking at least a second LTCC tape on the first tape to form a stack;
- (d) firing the stack at a sintering temperature sufficiently high to sinter ceramic components of the first and second LTCC tapes into a unitary structure;
- and
- (e) removing all or substantially all of the material from the channel.
In a method for forming a device comprising the steps of forming a channel in a first tape layer, stacking at least a second tape layer on the first tape layer;
- and firing the stack to sinter ceramic components of the first and second tape layers, the improvement comprising:
- (a) inserting a meltable material in the channel before stacking;
- and
- (b) removing all or substantially all of the meltable material from the channel during firing.
A device formed by the process that comprises the steps of:
- (a) forming a channel in a first tape layer;
- (b) inserting a meltable material in the channel;
- (c) stacking at least a second tape layer on the first tape layer;
- (d) pressing the first and second tape layers sufficiently to form a laminate;
- and
- (e) removing all or substantially all of the meltable material from the channel.
A device formed by the method that comprises the steps of:
- (a) forming a channel in a first LTCC tape;
- (b) inserting a material in the channel, the material selected from the group consisting of a wax, polyethylene, polystyrene, polypropylene, paraffin and combinations thereof;
- (c) stacking at least a second LTCC tape on the first tape to form a stack;
- (d) firing the stack at a sintering temperature sufficiently high to sinter ceramic components of the first and second LTCC tapes into a unitary structure;
- and
- (e) removing all or substantially all of the material from the channel.
Dependencies are inferred from the claim text.