Semiconductor inspection system and method

An inspection method for inspecting devices, the method comprising:

• transporting devices in a first tray from an input stacker to at least one inspection station along a first inspection path;
• inspecting the devices in the first tray at each inspection station along the first inspection path;
• transporting the devices in the first tray to a flipping mechanism along the first inspection path;
• flipping the devices into a second tray at a flipping location and transporting the devices in the second tray to a second inspection path;
• transporting the devices in the second tray to an integrated inspection and sorting station from the flipping mechanism along the second inspection path;
• and
• performing mark inspection of the devices in the second tray and sorting defective devices in the second tray at the single, integrated inspection and sorting station.

A flipping mechanism comprising:

• a loading bay and an unloading bay;
• a support frame;
• a flipping unit mounted on the support frame, the flipping unit to flip at least one of a first tray and a second tray at a flipping location laterally from the loading bay;
• and
• a tray transfer unit mounted on the support frame, the transfer unit to move at least one of the first tray and second from the loading bay to at least one of the flipping location and unloading bay.

An inspection method for inspecting devices comprising:

• transporting devices in a first tray from an input stacker to at least one inspection station along a first inspection path;
• inspecting the devices in the first tray at the inspection station;
• transporting the devices in the first tray to a flipping mechanism along the first inspection path;
• moving the devices in the first tray to a second tray using the flipping mechanism;
• transporting the devices in the second tray to an integrated inspection and sorting station from the flipping mechanism along a second inspection path;
• and
• performing mark inspection of the devices in the second tray and sorting defective devices in the second tray at the integrated inspection and sorting station.