Proximity effect correction apparatus, proximity effect correction method, storage medium , and computer program product
AssigneeFujitsu Limited
InventorHiroki Futatsuya
Life of this patent
Estimating the term…
Abstract
Light intensity values only of the vicinity of a specified portion, that is, for example, based on a prescribed value, an area where the distance between edges of an object to be corrected is equal to or shorter than the prescribed value are calculated, and the object to be corrected is corrected based on the light intensity values.
Claims18
A proximity effect correction method for automatically correcting a proximity effect in exposing a mask pattern by lithography, comprising the steps of:
- calculating light intensity values only of the vicinity of a specified portion where the proximity effect in an object to be corrected needs to be corrected;
- and
- correcting based on the light intensity values the object to be corrected.
A proximity effect correction method for automatically correcting a proximity effect occurring in exposing a mask pattern by lithography when the mask pattern being an object to be corrected has a desired form, the proximity effect correction method comprising:
- a first step of judging, based on a prescribed value, a side of the object to be corrected existing near an area where the distance between edges in the object of the desired form is equal to or shorter than the prescribed value as a portion to be corrected;
- a second step of calculating light intensity values only of the vicinity of the portion to be corrected;
- and
- a third step of correcting the object to be corrected based on the calculated light intensity values.
A proximity effect correction method for automatically correcting a proximity effect in exposing a mask pattern by lithography when the mask pattern being an object to be corrected does not have a desired form, the proximity effect correction method comprising:
- a first step of judging, based on a prescribed value, a side of the object to be corrected existing near an area where the distance between edges in an object of the desired form is equal to or shorter than the prescribed value as a portion where the proximity effect is to be corrected;
- a second step of calculating light intensity values only on the object of the desired form in a range near the portion to be corrected;
- and
- a third step of correcting the object to be corrected based on the calculated light intensity values.
A proximity effect correction apparatus for automatically correcting a proximity effect in exposing a mask pattern by lithography, comprising:
- a calculator for light intensity values only of the vicinity of a specified portion, which are necessary for correcting the proximity effect in an object to be corrected;
- and
- a corrector for the object to be corrected based on the light intensity values.
A proximity effect correction apparatus for automatically correcting a proximity effect occurring in exposing a mask pattern by lithography when the mask pattern being an object to be corrected has a desired form, the proximity effect correction apparatus comprising:
- a correction object determiner for judging, based on a prescribed value, a side of the object to be corrected existing near an area where the distance between edges in the object of the desired form is equal to or shorter than the prescribed value as a portion to be corrected;
- a light intensity value calculator for calculating light intensity values only of the vicinity of the portion to be corrected;
- and
- a corrector for correcting the object to be corrected based on the calculated light intensity values.
A proximity effect correction apparatus for automatically correcting a proximity effect in exposing a mask pattern by lithography when the mask pattern being an object to be corrected does not have a desired form, the proximity effect correction apparatus comprising:
- a portion-to-be-corrected determiner for judging, based on a prescribed value, a side of the object to be corrected existing near an area where the distance between edges in an object of the desired form is equal to or shorter than the prescribed value as a portion where the proximity effect is to be corrected;
- a light intensity value calculator for calculating light intensity values only on the object of the desired form in a range near the portion to be corrected;
- and
- a corrector for correcting the object to be corrected based on the calculated light intensity values.
A computer readable storage medium storing a computer program code means for designing circuit comprising, when a proximity effect occurring in exposing a mask pattern by lithography is automatically corrected in a case in which the mask pattern being an object to be corrected has a desired form:
- a first computer readable program code means for judging, based on a prescribed value, a side of the object to be corrected existing near an area where the distance between edges in the object of the desired form is equal to or shorter than the prescribed value as a portion to be corrected;
- a second computer readable program code means for calculating light intensity values only of the vicinity of the portion to be corrected;
- and
- a third computer readable program code means for correcting the object to be corrected based on the calculated light intensity values.
A computer readable storage medium storing a computer program code means for designing circuit comprising, when a proximity effect is automatically corrected in exposing a mask pattern by lithography in a case in which the mask pattern being an object to be corrected does not have a desired form:
- a first computer readable program code means for judging, based on a prescribed value, a side of the object to be corrected existing near an area where the distance between edges in an object of the desired form is equal to or shorter than the prescribed value as a portion where the proximity effect is to be corrected;
- a second computer readable program code means for calculating light intensity values only on the object of the desired form in a range near the portion to be corrected;
- and
- a third computer readable program code means for correcting the object to be corrected based on the calculated light intensity values.
A computer program product for designing circuit comprising, when a proximity effect occurring in exposing a mask pattern by lithography is automatically corrected in a case in which the mask pattern being an object to be corrected has a desired form:
- a first computer readable program code means for judging, based on a prescribed value, a side of the object to be corrected existing near an area where the distance between edges in the object of the desired form is equal to or shorter than the prescribed value as a portion to be corrected;
- a second computer readable program code means for calculating light intensity values only of the vicinity of the portion to be corrected;
- and
- a third computer readable program code means for correcting the object to be corrected based on the calculated light intensity values.
A computer program product for designing circuit comprising, when a proximity effect is automatically corrected in exposing a mask pattern by lithography in a case in which the mask pattern being an object to be corrected does not have a desired form:
- a first computer readable program code means for judging, based on a prescribed value, a side of the object to be corrected existing near an area where the distance between edges in an object of the desired form is equal to or shorter than the prescribed value as a portion where the proximity effect is to be corrected;
- a second computer readable program code means for calculating light intensity values only on the object of the desired form in a range near the portion to be corrected;
- and
- a third computer readable program code means for correcting the object to be corrected based on the calculated light intensity values.
Dependencies are inferred from the claim text.