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US 2003/0169520 A1Published application
Mirror assembly with thermal contour control
AssigneeIntel Corporation
InventorMichael Goldstein
Life of this patent
Estimating the term…
Abstract
A system for compensating for heating effects in a mirror. Different areas of the mirror are associated with buried temperature sensors. Each temperature sensor is monitored, and used to create a map of current temperatures. The map of current temperatures may be corrected according to baseline values, and then is used to compensate for temperature differences.
Claims27
A compensation system, comprising:
- a mirror having a reflecting surface and an exterior surface;
- an array of temperature detecting parts, each part in the array formed close to said reflecting surface at a measuring area of said mirror and detecting a temperature at said area close to said reflecting surface;
- and
- an array of temperature adjusting parts, each part in the array being at a heating/cooling area close to a respective measuring area of one of said temperature detecting parts but adjacent to said exterior surface, and each part in said array operative to adjust a temperature of said heating/cooling area.
1 more element
A mirror system, comprising:
- a mirror element, having a reflective surface of a specified shape, and an opposite surface, facing away from said reflective surface, and having a plurality of holes formed over an area of said opposite surface extending to an area close to said reflective surface and within two millimeters of said reflective surface.
A method of forming a mirror, comprising:
- forming a mirror blank having a first surface which will form an optically reflective surface, and a second surface opposite said first surface;
- forming a plurality of holes in said second surface extending towards said first surface, and reaching a distance that is two millimeters or less from said first surface;
- and
- finally polishing said first surface of said mirror blank after said forming said plurality of holes.
1 more element
An article, comprising:
- a machine-readable medium which stores machine-readable instructions, said instructions operative to receive a plurality of signals indicating an initial temperature map over specified areas of a monitored mirror, to form a baseline map;
- determine heated temperatures of said mirror at said specified areas during operation of said mirror to form a contour map;
- and
- compare said contour map with a desired temperature map to form a difference map indicating desired temperature changes to said specified area of said mirror.
1 more element
Dependencies are inferred from the claim text.