Reaction frame for a wafer scanning stage with electromagnetic connections to ground

A stage assembly comprising:

• a stage base;
• a stage, the stage being arranged to slide with respect to the stage base, wherein the stage has three associated degrees of freedom;
• a motor, the motor being arranged to cause the stage to slide with respect to at least one of the three associated degrees of freedom, wherein when the motor causes the stage to slide with respect to the at least one of the three associated degrees of freedom, and at least one reaction force is created with respect to the at least one of the three associated degrees of freedom;
• a frame, the frame being arranged to support at least a portion of the motor, the frame being substantially mechanically decoupled from the stage base to substantially prevent the at least one reaction force from affecting the stage, wherein the at least one reaction force is arranged to be imparted on the frame;
• and
• an actuator, the actuator being arranged to be coupled between the reaction frame and a ground surface, the actuator having a stiffness and a damping, the actuator further being arranged to reduce a transmission of vibrations through the reaction frame.

A stage assembly comprising:

• a stage base;
• a stage, the stage being arranged to slide with respect to the stage base, wherein the stage has three associated degrees of freedom;
• a motor, the motor being arranged to cause the stage to slide with respect to at least one of the three associated degrees of freedom, wherein when the motor causes the stage to slide with respect to the at least one of the three associated degrees of freedom, a at least one reaction force is created;
• a frame, the frame being arranged to support at least a portion of the motor, the frame being substantially mechanically decoupled from the stage base to substantially prevent the at least one reaction force from affecting the stage, wherein the at least one reaction force is arranged to be imparted on the frame;
• and
• a low-pass filter, the low-pass filter being arranged between the reaction frame and a ground surface, the low-pass filter being arranged to filter vibrations transmitted between the ground surface and the reaction frame through the low-pass filter.