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US 2003/0164596 A1Published application
Valve seal assembly
AssigneeDuPont Dow Elastomers L.L.C.
InventorsDale Robert Kane, Norihisa Minowa, Kohtaro Takahashi
Life of this patent
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Abstract
The present invention is directed to a valve seal assembly for use in multi-chamber vacuum devices. The seal assembly comprises a door and a deformable seal ring running along the periphery of the door, wherein the seal ring is held in place by a reversibly mounted securing means such as a disk, ring or clamp.
Claims11
A valve seal assembly for use in vacuum chambers of semiconductor manufacturing equipment, said valve assembly comprising:
- a) a door having a groove for receiving a seal ring, said groove formed on a sealing surface near a periphery of said door, and wherein a first portion of said groove is formed of a base, an outer sidewall and outer lip in said door;
- b) a securing means for holding a seal ring within said groove on said door, said securing means having an outer sidewall and lip which forms a second portion of said groove;
- c) fastening means for attaching said securing means to said door;
- and
- d) a deformable seal ring shaped and sized to complementarily fit within said groove, said seal ring comprising a first thin portion for complementarily engaging said first portion of said groove and a second thin portion for complementarily engaging said second portion of said groove, and said seal ring having a thick portion located between said first and second thin portions and sized to extend beyond said door lip.
2 more elements
Dependencies are inferred from the claim text.