Ceramic heater
AssigneeIbiden Co., Ltd.
InventorsYasutaka Ito, Yasuji Hiramatsu
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Abstract
The present invention has its object to provide a ceramic heater which has a high thermal conductivity so that the surface temperature of the heater plate promptly follows the temperature change of the heating element to control the temperature of the wafer-heating surface with high efficiency and the thermal diffusion of impurity from the ceramic heater can be successfully prevented. This invention provides a ceramic heater comprising a nitride ceramic substrate and a heating element either on the surface or internally of said substrate wherein said nitride ceramic board contains an element other than constituent elements of nitride ceramics and a work-heating surface has the JIS B 0601 surface roughness of Rmax=0.2 to 200 μm.
Claims26
A ceramic heater comprising a ceramic substrate and a heating element disposed either on a surface or internally of the substrate,
- wherein the work-heating surface has a JIS B 0601 surface roughness of Rmax=0.05 to 200 μm.
A ceramic heater comprising a ceramic substrate and a heating element disposed either on a surface or internally of the substrate,
- wherein said ceramic substrate contains an element other than its dominant constituent elements and the work-heating surface of the heater has a JIS B 0601 surface roughness of Rmax=0.2 to 200 μm.
A ceramic heater comprising a nitride ceramic substrate and a heating element either on a surface or internally of said substrate,
- wherein said nitride ceramic substrate contains an element other than its principal constituent elements and the work-heating surface of the heater has a JIS B 0601 surface roughness of Rmax=0.2 to 200 μm.
A ceramic heater comprising a nitride ceramic substrate and a heating element either on a surface or internally of said substrate,
- wherein said nitride ceramic board contains at least one element selected from Na, B, Y, Li, Rb and Ca and a work-heating surface has a JIS B 0601 roughness value of Rmax=0.2 to 200 μm.
Dependencies are inferred from the claim text.