Liquid processing apparatus and liquid processing method

A liquid processing apparatus which supplies a plurality of substrates with a processing Liquid to perform a liquid processing in a batch manner, comprising:

• a container mounting part for mounting a container where a plurality of substrates are accommodated at intervals of a constant pitch;
• substrate holder capable of holding the plural substrates in substantially parallel with each other;
• substrate transporter for transporting the substrates between the container mounted on the container mounting part and the substrate holder;
• a chamber capable of accommodating the substrate holder therein;
• processing-liquid supplyer for supplying the substrates accommodated in the chamber with a processing liquid;
• and
• a transportation control device that controls the operation of the substrate transporter in a manner that the substrate transporter picks up the substrates in designated number from the plural containers mounted on the container mounting part;
• subsequently delivers the substrates to the substrate holder thereby forming one batch of substrates;
• and further returns each substrate after the liquid processing to an original slot in an original container where the substrate was,
• whereby the composition of the substrates supplied for one batch of liquid processing can be changed optionally.

A liquid processing method of supplying a plurality of substrates with a processing liquid while rotating the substrates thereby performing a liquid processing in batches, comprising the steps of:

• carrying the substrates one by one out of a container where the plural substrates are accommodated at intervals of a constant pitch and allowing substrate holder to hold the substrates at intervals of an optional pitch, the substrate holder being capable of holding the substrates at intervals of a pitch smaller than a pitch of the substrates held by the container;
• accommodating the substrate holder holding a designated number of substrates, in a chamber;
• and
• supplying the substrates with the processing liquid while rotating the substrates accommodated in the chamber thereby performing the liquid processing.

A liquid processing method of supplying a plurality of substrates with a processing liquid thereby performing a liquid processing in batches, comprising the steps of:

• picking up the substrates in designated number from a plurality of containers and allowing substrate holder capable of holding the substrates at intervals of a designated pitch to hold the substrates thereby forming one batch of substrates;
• accommodating the substrate holder holding the substrates, in a chamber;
• supplying the substrates accommodated in the chamber with the processing thereby performing the liquid processing;
• and
• returning each substrate after the liquid processing to an original slot in an original container where the substrate was,
• whereby the liquid processing for the substrates is carried out upon changing the composition of the substrates supplied for one batch of liquid processing optionally.

A liquid processing method of supplying a plurality of substrates with a processing liquid while rotating the substrates thereby performing a liquid processing in batches, comprising the steps of:

• carrying the substrates one by one out of a first container where the plural substrates are accommodated in their substantially-horizontal postures at regular intervals vertically and allowing a first substrate holding part to hold a designated number of substrates in substantially parallel with each other at intervals of a constant pitch vertically and thereafter, carrying the substrates one by one out of a second container where the plural substrates are accommodated in their substantially-horizontal postures at regular intervals vertically and allowing a second substrate holding part to hold a designated number of substrates in substantially parallel with each other at intervals of a constant pitch vertically;
• changing the postures of the substrates held by the first substrate holding part and the second substrate holding part to their substantially-vertical postures;
• moving the substrates in their substantially-vertical postures, which are held by the first substrate holding part and the second substrate holding part, to substrate holder;
• accommodating the substrate holder holding the substrates, in a chamber and supplying the substrates with the processing liquid while rotating the substrate holder thereby performing the liquid processing;
• transporting the substrates after the liquid processing to the first substrate holding part and the second substrate holding part;
• changing the postures of the substrates held by the first substrate holding part and the second substrate holding part to their substantially-horizontal postures;
• and
• returning the substrates held by the first substrate holding part to the first container and thereafter, returning the substrates held by the second substrate holding part to the second container.