Method for producing an antifuse and antifuse for the selective electrical connection of adjacent conductive regions
AssigneeInfineon Technologies AG
InventorsMatthias Lehr, Uwe Schilling, Veronika Polei, Irene Sperl
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Abstract
A method for producing antifuse structures and antifuses by which adjacent conductive regions can be selectively electrically connected involve the application of a sacrificial layer to a first conductive region. The sacrificial layer is patterned with the aid of a photolithographic method. A fuse layer is applied and the sacrificial layer is then removed. A non-conductive layer is applied and a conductive material is introduced in an opening in the non-conductive layer for the purpose of forming a second conductive region.
Claims10
A method for producing an antifuse, which comprises the steps of:
- providing a first conductive region;
- applying a sacrificial layer to the first conductive region;
- patterning the sacrificial layer resulting in an opening being formed in the sacrificial layer above the first conductive region;
- applying a fuse layer at least in a region of the opening in the sacrificial layer;
- removing the fuse layer lying on a surface of the sacrificial layer with an aid of a chemical mechanical polishing method;
- removing the sacrificial layer;
- applying a non-conductive layer;
- forming an further opening in the non-conductive layer above the first conductive region;
- and
- introducing a conductive material into the further opening resulting in a formation of a second conductive region.
Dependencies are inferred from the claim text.