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US 2003/0157424 A1Published application
Positive photoresist composition
AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsMitsuo Hagihara, Toshiaki Tachi, Kenji Maruyama
Life of this patent
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Abstract
A composition includes (A) an alkali-soluble resin; and (B) (b-1) a compound of Formula (I): 1 wherein Ds are each a hydrogen atom or a naphthoquinonediazidosulfonyl group; and (b2) a quinonediazide ester of, for example, bis(2-methyl-4-hydroxy-5-cyclohexylphenyl)-3,4-dihydroxyphenylmethane.
Claims4
A positive photoresist composition comprising:
- (A) an alkali-soluble resin ingredient;
- and
- (B) a quinonediazide ester ingredient,
- wherein the ingredient (B) comprises:
- (b1) a quinonediazide ester represented by following Formula (I):
- 6
- wherein each of Ds is independently a hydrogen atom or a 1,2-naphthoquinonediazido-5-sulfonyl group, where at least one of Ds is a 1,2-naphthoquinonediazido-5-sulfonyl group;
- and
- (b2) a quinonediazide ester, other than the quinonediazide ester (b1), represented by following Formula (II):
- 7
- wherein each of R1, R2, R3, R4, R5, R6, R7, and R8 is independently a hydrogen atom, a halogen atom, an alkyl group containing 1 to 6 carbon atoms, an alkoxy group containing 1 to 6 carbon atoms, or a cycloalkyl group containing 3 to 6 carbon atoms;
- each of R9, R10, and R11 is independently a hydrogen atom or an alkyl group containing 1 to 6 carbon atoms;
- Q is a hydrogen atom or an alkyl group containing 1 to 6 carbon atoms, or Q is combined with R9 to form a cycloalkyl group containing 3 to 6 carbon members or a residue represented by following Formula (III):
- 8
- wherein each of R12 and R13 is independently a hydrogen atom, a halogen atom, an alkyl group containing 1 to 6 carbon atoms, an alkoxy group containing 1 to 6 carbon atoms, or a cycloalkyl group containing 3 to 6 carbon atoms;
- and
- c is an integer from 1 to 3;
- each of Ds is independently a hydrogen atom or a 1,2-naphthoquinonediazido-5-sulfonyl group, where at least one of Ds is a 1,2-naphthoquinonediazido-5-sulfonyl group;
- each of a and b is independently an integer from 1 to 3;
- d is an integer from 0 to 3;
- and
- n is an integer from 0 to 3,
- wherein, when n is 0, Q is the residue represented by Formula (III) or is combined with R9 to form a cycloalkyl group containing 3 to 6 carbon atoms.
20 more elements
Dependencies are inferred from the claim text.