Film forming method and substrate
AssigneeKonica Corporation
InventorsWataru Mizuno, Kazuhiro Fukuda, Yoshikazu Kondo, Yoshiro Toda, Kiyoshi Oishi, Akira Nishiwaki
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Abstract
A film forming method comprising: supplying a reactive gas comprising a compound including a metal atom between facing electrodes; arranging a substrate between the electrodes; making the reactive gas in a plasma state by applying a voltage between the electrodes under atmospheric pressure or under a pressure in a vicinity of the atmospheric pressure and discharging; and forming a metal film on a surface of the substrate by supplying a reducing gas having a reducing property into a plasma atmosphere in which the reactive gas in the plasma state exists.
Claims28
A film forming method comprising:
- supplying a reactive gas comprising a compound including a metal atom between facing electrodes;
- arranging a substrate between the electrodes;
- making the reactive gas in a plasma state by applying a voltage between the electrodes under atmospheric pressure or under a pressure in a vicinity of the atmospheric pressure and discharging;
- and
- forming a metal film on a surface of the substrate by supplying a reducing gas having a reducing property into a plasma atmosphere in which the reactive gas in the plasma state exists.
A film forming method comprising:
- supplying a reactive gas comprising a compound including a metal atom between facing electrodes;
- arranging a substrate between the electrodes;
- making the reactive gas in a plasma state by applying a voltage between the electrodes under atmospheric pressure or under a pressure in a vicinity of the atmospheric pressure and discharging;
- and
- forming a metal film on a surface of the substrate by supplying a reducing gas having a reducing property into a plasma atmosphere in which the reactive gas in the plasma state exists, and by discharging by supplying an electricity not less than 1 W/cm2 under a high-frequency voltage over 100 kHz between the facing electrodes.
Dependencies are inferred from the claim text.