Back to results
US 2003/0156152 A1Published application
Cleaning nozzle
AssigneeSpectra, Inc.
InventorsJohn F. Ray, Thomas B. Alexander, Frederick H. Amidon JR., Carl A. Tracy
Life of this patent
Estimating the term…
Abstract
A sheath gas isolates cold portions of a cleaning nozzle and/or a workpiece to reduce condensation.
Claims11
A gas cleaning nozzle assembly, comprising:
- a nozzle outlet by which cleaning gas is directed and a sheath gas jacket that surrounds at least a portion of the nozzle and directs a sheath gas into contact with said nozzle.
A method using a gas jet cleaning nozzle with the following steps:
- directing a cleaning gas through a nozzle and
- directing a sheath gas around the nozzle.
Dependencies are inferred from the claim text.