EEPROM memory cell with high radiation resistance

Abstract

An EEPROM memory cell with high radiation resistance is provided. The present EEPROM memory cell comprises a semiconductor substrate of a first conductivity, a source having a region of the semiconductor substrate doped to have a second conductivity opposite to the first conductivity, a drain spaced from the source and having a region of the semiconductor substrate doped to have the second conductivity, a channel formed in the space between the source and the drain within the semiconductor substrate, a first oxide layer with a first thickness overlying and covering the channel of the semiconductor substrate, a conducting charge trapping layer formed on the first oxide layer, a second oxide layer with a second thickness more than the first thickness of the first oxide layer, overlying and covering the conducting charge trapping layer and a conducting gate layer formed on the second oxide layer.

Dependencies are inferred from the claim text.