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US 2003/0155235 A1Published application
Sputtering target producing few particles
AssigneeNikko Materials Co., Ltd.
InventorsHirohita Miyashita, Takeo Okabe
Life of this patent
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Abstract
A sputtering target having a sprayed coating at least on the side face thereof and producing few particles. The deposit produced on the side face of the sputtering target is prevented from separating and flying.
Claims6
A sputtering target producing few particles characterized in comprising a sprayed coating having a surface roughness of 10 to 20 μm Ra (average roughness of center line) at least on the side face of the sputtering target.
Dependencies are inferred from the claim text.