Method of producing a body of semiconductor material having a reduced mean free path length
AssigneeInfineon Technologies AG
InventorsVeli Kartal, Hans-Joachim Schulze
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AssigneeInfineon Technologies AG
InventorsVeli Kartal, Hans-Joachim Schulze
Estimating the term…
A method for producing a body (1) consisting of doped semiconductor material having a defined mean free path length (lambda n) for free charge carriers (CP), and a mean free path length (lambda r) for the free charge carriers (CP) which is smaller than the defined mean free path length (lambda n) is disclosed. An epitactic crystal layer (20) consisting of doped semiconductor material is produced on a substrate crystal (10) consisting of semiconductor material having the defined mean free path length (lambda n), said crystal layer having, at least locally, a mean free path length (lambda r) for the free charge carriers (CP) which is smaller than the defined mean free path length (lambda n). The body (1) can also be produced by joining two crystal bodies (10′, 10″) consisting of doped semiconductor material.
A method of manufacturing a body of doped semiconductor material having a certain mean free path length for free charge carriers and a mean free path length for the free charge carriers which is smaller than the certain mean free path length, having the step:
A method of manufacturing a body of doped semiconductor material having a certain mean free path length for free charge carriers and a mean free path length for the free charge carriers which is smaller than the certain mean free path length, comprising the step:
A body of doped semiconductor material comprising:
The body of doped semiconductor material comprising:
Dependencies are inferred from the claim text.