Method and apparatus for aligning a cassette handler
AssigneeApplied Materials, Inc.
InventorsAlan Rick Lappen, Keith P. Weigman, Ronald Vern Schauer
Life of this patent
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AssigneeApplied Materials, Inc.
InventorsAlan Rick Lappen, Keith P. Weigman, Ronald Vern Schauer
Estimating the term…
Methods and apparatuses for aligning workpiece and cassette handlers in an automated workpiece handling system are provided. The apparatus comprises an alignment pin and a frame adapted to be supported by a cassette handler support surface. The frame has first and second apertures defined by first and second alignment surfaces which are adapted to receive the alignment pin. The robot blade has a blade aperture which is defined by a blade alignment surface which is adapted to receive the alignment pin when the robot blade is positioned in a first predetermined position when the pin is received by the first aperture and the blade aperture. The blade alignment surface is further adapted to receive the alignment pin when the robot blade is positioned in a second predetermined position when the pin is received by the second aperture and the blade aperture.
An apparatus for aligning a cassette handler to a movable robot blade for carrying a workpiece in a workpiece handling system wherein the cassette handler has a support surface for supporting a workpiece cassette having a plurality of slots for carrying workpieces, the apparatus comprising:
An apparatus for aligning a cassette handler to a movable robot blade for carrying a workpiece in a workpiece handling system, wherein the robot blade defines a blade aperture means and wherein the cassette handler has a support surface for supporting a workpiece cassette, the apparatus comprising:
An apparatus for aligning a cassette handler to a movable robot blade for carrying a workpiece in a workpiece handling system wherein the cassette handler has a support surface for supporting a workpiece cassette, and wherein the robot blade defines a blade aperture means, the apparatus comprising:
A method of aligning a cassette handler to a movable robot blade for carrying a workpiece in a workpiece handling system wherein the cassette handler has a support surface for supporting a workpiece cassette having a plurality of slots for carrying workpieces, the method comprising:
A method of aligning a cassette handler to a movable robot blade for carrying a workpiece in a workpiece handling system wherein the cassette handler has a support surface for supporting a workpiece cassette having a plurality of slots for carrying workpieces and wherein the support surface has an axis of rotation extending orthogonally from the support surface, the method comprising:
An apparatus for aligning a cassette handler to a movable robot blade for carrying a workpiece in a workpiece handling system wherein the cassette handler has a support surface for supporting a workpiece cassette and wherein the robot blade defines a blade aperture means, the apparatus comprising:
Dependencies are inferred from the claim text.