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US 2003/0153106 A1Published application
Method for determining the location of a droplet on a component
AssigneeMicron Technology, Inc.
InventorsGayle Buhrer, Zane L. Drussel
Life of this patent
Estimating the term…
Abstract
Method for determining the location of a droplet of liquid placed on a surface of a semiconductor wafer. In one embodiment the method includes establishing first and second reference axes that intersect at a point and superimposing the point over the droplet on the semiconductor wafer surface. A first reference coordinate indicative of the position of the point along the first axis and a second reference coordinate indicative of the position of the point along the second axis are generated.
Claims10
A method for determining the location of a droplet of liquid placed on a semiconductor wafer surface, comprising:
- establishing a reference point;
- superimposing the point over the droplet of liquid;
- generating reference indicia indicative of the location of the droplet on the semiconductor surface.
Dependencies are inferred from the claim text.