3-ring magnetic anti-gravity support
AssigneeNikon Corporation
InventorJean-Marc Gery
Life of this patent
Estimating the term…
Abstract
An apparatus for providing support between a first structure and a second structure is described. The apparatus includes a first section and a second section. The first section has a first group of at least one magnetic frame member, and is coupled to the first structure. The second section has a second group of at least one magnetic frame member, and is coupled to the second structure. The first and second sections present magnetic force therebetween.
Claims31
An apparatus for providing support between a first structure and a second structure, comprising:
- a first section having a first group of at least one magnetic frame member, the first section being coupled to the first structure;
- and
- a second section having a second group of at least one magnetic frame member, the second section being coupled to the second structure;
- wherein
- the first and second sections present magnetic force therebetween.
A method of providing support between a first structure and a second structure, comprising:
- coupling a first section to the first structure, the first section having a first group of at least one magnetic frame member;
- and
- coupling a second section to the second structure, the second section having a second group of at least one magnetic frame member;
- wherein
- the first and second sections present magnetic force therebetween.
A lithography system comprising:
- an illumination system that irradiates radiant energy;
- a positioning apparatus that disposes a substrate on a path of the radiant energy;
- and
- a system that provides support between a first structure and a second structure, the system including,
- a first section having a first group of at least one magnetic frame member, the first section being coupled to the first structure;
- and
- a second section having a second group of at least one magnetic frame member, the second section being coupled to the second structure;
- wherein
- the first and second sections present magnetic force therebetween.
Dependencies are inferred from the claim text.