Heated substrate support

A substrate support for supporting a substrate, comprising:

• a first metallic plate having a first surface and an opposing second surface;
• a second metallic plate coupled to the first plate;
• at least one guide disposed between the second surface of the first plate and a first surface of the second plate;
• and
• a resistive heating element laterally retained by the guide relative to the second surface of the first plate.

A substrate support for supporting a substrate, comprising:

• a first metallic plate having a first surface and an opposing second surface;
• a second metallic plate coupled to the first plate;
• at least one guide having a central body disposed between the second surface of the first plate and a first surface of the second plate;
• a channel formed in the central body;
• a plurality of tabs extending from the central body, the tabs coupled to the second surface of the first plate;
• and
• a resistive heating element disposed in the guide and urged against the second surface of the first plate.

A heating chamber for heating a substrate, the chamber comprising:

• a chamber body defining an interior volume,
• a substrate storage cassette having walls;
• a plurality of heated first support plates coupled to the walls and stacked parallel to each other within the interior volume, the first support plates having a first surface adapted to support the substrate;
• and
• a heating element urged against a second side of each support plate, the second side opposing the first side.

A heating chamber for heating a substrate, the chamber comprising:

• a chamber body defining an interior volume,
• a substrate storage cassette having walls;
• a plurality of heated first support plates coupled to the walls and stacked parallel to each other within the interior volume, the first support plates having a first surface adapted to support the substrate;
• a metallic guide having a channel facing a second surface of the first support plate;
• a resistive heating element disposed in the channel urged against a second side of each support plate, the second side opposing the first side;
• and
• a second support plate sandwiching the guide with the first support plate.

A method for fabricating a heated support plate comprising:

• providing a metallic first plate having a first surface adapted to support a substrate and an opposing second surface, and a second metallic plate;
• forming a channel in at least one of the plates;
• sandwiching a resistive heater disposed in the channel between the first and second plates;
• and
• compressing the resistive heater from a non-compressed height to a compressed height equal to a depth of the channel.