US 2003/0150560 A1 · Reactor assembly and processing method

Abstract

A reactor assembly and processing method for treating a substrate generally includes a base unit, a chuck assembly, a process chamber, an inlet manifold assembly and an exit manifold assembly. The inlet manifold assembly is in fluid communication with a first opening of the process chamber, wherein the inlet manifold assembly comprises a flow-shaping portion adapted to laterally elongate a gas and/or a reactant flow into the process chamber. The exhaust manifold assembly in fluid communication with a second opening of the process chamber and is diametrically opposed to the inlet manifold assembly. The process includes flowing a gas and/or reactive species into the process chamber of the reactor assembly in a direction that is about planar with the substrate surface providing improved uniformity and increased reactivity.

Claims36

Dependent claims

A reactor assembly comprising:

a base unit;
a chuck assembly disposed in a cavity of the base unit, wherein the chuck assembly comprises a support having a surface capable of receiving a substrate;
a process chamber comprising a top wall, a bottom wall, and sidewalls extending therefrom, wherein the process chamber is coupled to the base unit;
an inlet manifold assembly in fluid communication with a first opening of the process chamber in a selected one of the sidewalls, wherein the inlet manifold assembly comprises a flow-shaping portion adapted to laterally elongate a gas and/or a reactant flow into the process chamber;
and
an exhaust manifold assembly in fluid communication with a second opening of the process chamber in the sidewall diametrically opposed from the selected one of the sidewalls.

3 more elements

Dependencies are inferred from the claim text.

Reactor assembly and processing method

Life of this patent

Reactor assembly and processing method

Life of this patent

Abstract

Claims36