Wafer transport pod with linear door opening mechanism
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsHsien-Hua Tseng, Chia-Hung Chung
Life of this patent
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Abstract
A pod for transporting a cassette of semiconductor wafers that is equipped with a linearly operated door opening/closing mechanism is provided. The pod includes a body member, a cover member and a latch means carried on the cover member for latching the cover member onto the body member. The latch means is acuatable and operable linearly from a latched condition in which the cover member is latched onto the body member to a released condition allowing removal of the cover member from the body member when engaged linearly by a latch key of a door opener situated in a loadport onto which the cassette pod is positioned.
Claims12
A pod for transporting a cassette of semiconductor wafers, comprising:
- a body member constructed of a top wall, a bottom wall, a front wall and two sidewalls forming a back opening for loading or unloading wafers into or out of said body member;
- a cover member for sealingly and removably engaging said back opening of the body member;
- and
- latch means carried on said cover member for latching said cover member onto said body member, said latch means being actuatable and operable linearly from a latched condition in which said cover member is latched onto said body member to a released condition allowing removal of said cover member from said body member when engaged linearly by a latch key of a door opener situated in a loadport onto which said pod is positioned.
A pod for transporting a cassette of semiconductor wafers, comprising:
- a body member constructed of a top wall, a bottom wall, a front wall and two sidewalls forming a back opening for loading or unloading wafers into or out of said body member;
- a cover member for sealingly and removably engaging said back opening of the body member;
- and
- latch means carried on said cover member for latching said cover member onto said body member, said latch means further comprises:
- at least two locking tabs with at least one operating on one of two opposing sides of said cover member for engaging receptacles provided in said body member;
- and
- at least two latch holes with one connected to and linearly operates said at least one locking tab when the latch hole is engaged by a latch key of a door opener in the loadport.
Dependencies are inferred from the claim text.