Apparatus for devices for determining properties of applied layers
AssigneeLeybold Optics GmbH
InventorEckhard Wirth
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Abstract
The invention relates to an apparatus for devices for determining properties of thin layers applied on a substrate. This apparatus comprises two changing magazines wherein one magazine is provided for crystal resonators and the other magazine for test glasses. The changing magazine for crystal resonators has the form of a disk and is encompassed by the annular magazine for test glasses. Both can be rotated independently of one another. Each position of the magazines can be reproduced with the aid of sensors and evaluation devices. Consequently, it is possible to carry out multiple coatings.
Claims15
Apparatus for devices for determining properties of applied layers, comprising
- a rotatable test glass magazine with at least two discrete test glasses;
- a rotatable crystal resonator magazine with at least two crystal resonators,
- with one magazine being disposed within the other magazine (for example 30).
Dependencies are inferred from the claim text.