Back to results
US 2003/0147082 A1Published application
Interferometric patterning for lithography
AssigneeIntel Corporation
InventorMichael Goldstein
Life of this patent
Estimating the term…
Abstract
Production of interference patterns from incoherent light sources by using an optical filter, a field mirror, and a plane mirror. The optical filter is designed to filter incoherent light waves and generate coherent light waves. The field mirror is arranged to convert the coherent light waves into plane waves. The plane mirror is arranged as a Lloyd's mirror to generate interference patterns from the plane waves.
Claims25
An apparatus comprising:
- a filter arranged to reduce the bandwidth of incident radiation and produce a diffraction pattern therefrom;
- conversion optics configured to receive divergent radiation from said diffraction pattern and convert the radiation to substantially planar waves;
- and
- interference optics arranged to direct said planar waves into interference.
1 more element
Apparatus for testing properties of a photo-resist material, comprising:
- a surface configured to support a layer of the photo-resist material;
- an optical filter comprising a reflective stack and a slit;
- a parabolic mirror disposed at a location such that the focal point of the parabolic mirror is near the slit;
- and
- a plane mirror disposed to receive radiation from the parabolic mirror and form an interference pattern on the photo-resist.
2 more elements
A method comprising:
- receiving incident light waves;
- filtering the incident light waves using a reflective stack with layers to reduce the bandwidth of light waves that are reflected;
- passing the filtered light waves through a slit to generate an interference pattern having a main lobe;
- converting the light waves in the main lobe into light waves that are substantially planar;
- and
- generating alternating bright and dark regions on a surface from the light waves that are substantially planar.
3 more elements
Dependencies are inferred from the claim text.