Storage containers for lithography mask and method of use

A container for storing a lithographic printing mask comprising:

• a first container section formed of a sturdy material;
• and
• a second container section formed of a sturdy material, wherein when the first and second container sections are placed together they define a cavity therein having a size to fixedly house a mask while not contacting a mask pattern on the mask and provide an air tight seal around the cavity when pressure within the cavity is less than pressure outside the container such that dust and other particles cannot reach the mask housed in the cavity.

A container for storing a lithographic printing mask comprising:

• a first container section formed of a sturdy material and defining a first cavity which is shaped for contacting an edge section of a mask to be stored in the container and covers, but does not contact an area of a mask pattern on the mask when the edge section of the mask is placed in the cavity;
• a second container section formed from a sturdy material and defining a second cavity therein having a size which contacts an edge section of a mask to be stored in the container wherein when the first and second container sections are placed together they fixedly house the mask in the first and second cavities and provide an air tight seal around the cavity when pressure within the first and second cavities is less than pressure outside the container such that dust and other particles cannot reach the mask housed in the cavity.

A container for storing a lithographic printing mask comprising:

• a first container section formed of a sturdy material and defining a first cavity which is shaped for contacting an edge section of a mask to be stored in the container and covers, but does not contact an area of a mask pattern on the mask when the edge section of the mask is placed in the cavity;
• a second container section formed from a sturdy material and defining a second cavity therein having a size which contacts an edge section of a mask to be stored in the container wherein when the first and second container sections are placed together they fixedly house the mask in the first and second cavities and provide an air tight seal around the cavity when pressure within the first and second cavities is less than pressure outside the container such that dust and other particles cannot reach the mask housed in the cavity.