Stage control apparatus, exposure apparatus, and device manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorMasahiro Morisada
Life of this patent
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Abstract
A stage control apparatus which constitutes at least part of a control system for controlling a stage in alignment operation, including a compensator which generates a signal for controlling to drive the stage to a target position, a resonance elimination unit which has variable cutoff characteristics and eliminates a resonance frequency component contained in an output signal from the compensator to output the signal as a control signal for controlling the stage, and an adjustment unit which sets the cutoff characteristics of the resonance elimination unit, wherein the adjustment unit adjusts the cutoff characteristics of the resonance elimination unit on the basis of a signal generated in the control system.
Claims13
A stage control apparatus which constitutes at least part of a control system for controlling a stage in alignment operation, comprising:
- a compensator which generates a signal for controlling to drive the stage to a target position;
- a resonance elimination unit which has variable cutoff characteristics and eliminates a resonance frequency component contained in an output signal from said compensator to output the signal as a control signal for controlling the stage;
- and
- an adjustment unit which adjusts the cutoff characteristics of said resonance elimination unit,
- wherein said adjustment unit adjusts the cutoff characteristics of said resonance elimination unit on the basis of a signal generated in the control system.
Dependencies are inferred from the claim text.