Stiction alleviation using passivation layer patterning

A MEMS apparatus, comprising:

• a substrate;
• a passivation layer on the substrate, the passivation layer having a top surface;
• a support attached to the substrate;
• and
• a beam attached at one end to the support and suspended above the substrate, the beam having a bottom surface facing the top surface of the passivation layer;
• wherein the passivation layer is patterned so that the top surface of the passivation layer is substantially different from the bottom surface of the beam.

A method of fabricating a MEMS structure, comprising the steps of:

• depositing a passivation layer onto a substrate;
• patterning a predetermined pattern into the passivation layer;
• depositing a sacrificial layer onto the patterned passivation layer;
• forming a microstructure on the sacrificial layer such that the microstructure overlaps the patterned passivation layer;
• and
• removing the sacrificial layer to release the microstructure above the patterned passivation layer.