Wafer cassette pod equipped with position sensing device
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsHisen-Hwa Tseng, Chia-Hung Chung, Ming-Chien Wen
Life of this patent
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Abstract
A wafer cassette pod that is equipped with at least one position sensing device to avoid the accidental falling of a cassette pod door resulting in wafer breakage. The wafer cassette pod is provided with at least one position sensing device mounted in the sidewall of the cassette pod with a finger member protruding from the end surface of the sidewall forming the cassette pod opening. When the wafer cassette pod is not properly positioned, or docked on the loadport, the spring force of the position sensing device pushes the cassette pod away from the entrance of the loadport and thus, preventing the accidental falling of a cassette pod poor resulting in possible wafer breakage problems.
Claims10
A wafer cassette pod equipped with a position sensing device comprising:
- a cassette pod body formed of a top panel, a bottom panel, a front panel and two side panels;
- a rear opening in said cassette pod body formed by said top panel, said bottom panel and said two side panels for receiving wafers therethrough, said two side panels further comprises recessed slots on inside surfaces for positioning said wafers;
- and
- at least two spring-loaded position sensing devices each mounted in one of said two side panels with a finger protruding beyond an end surface of said side panel to push said cassette pod body away form a loadport of a process machine when said cassette pod body is not properly positioned on said loadport.
Dependencies are inferred from the claim text.