US 2003/0144757 A1Published application

Method for wafer position data retrieval in semiconductor wafer manufacturing

AssigneeInfineon Technologies AG

InventorsSilka Haschke, Andreas Wintergerst

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Abstract

Semiconductor products, especially semiconductor wafers, are processed according to a defined sequence of orders with the products arranged in a container. Product processing data of product processing steps are stored with reference to product position data identifying product positions in the product containers. When the position of products in a container is required, a product handling order is defined and integrated in the predefined sequence of orders thereby resulting in an extended sequence of orders. The product processing steps and the product handling step are executed in compliance with the extended sequence of orders and product position change data are stored. All slot-related semiconductor processing information are thereby automatically brought in conformity with the actual material flow in cases where handling steps are executed that change the semiconductor positions upon irregular processing execution.

Claims11

Dependent claims

A method for processing semiconductor products, which comprises:

predefining a sequence of orders and executing product processing steps with product processing tools;
during regular processing, executing the product processing steps in compliance with the predefined sequence of orders;
thereby transporting a multiplicity of products to be processed in product containers;
and
storing product processing data of product processing steps with reference to product position data identifying product positions in the product containers and to product identification codes;
upon improper processing performance requiring an unforeseen product handling step of changing one of a number and a position of a semiconductor product in one or more product containers:
defining a product handling order and integrating the product handling order in the predefined sequence of orders, to form an extended sequence of orders;
executing the product processing steps and the product handling step in compliance with the extended sequence of orders;
and
storing product position change data corresponding to the integrated product handling step.

7 more elements

Dependencies are inferred from the claim text.