Method of spiking mixed acid liquid in reactor
AssigneeWinbond Electronics Corp.
InventorsChih-Jung Ni, Jia-Shing Jan
Life of this patent
Estimating the term…
Abstract
A method of spiking a mixed acid liquid in a reactor is performed under three modes of control, a based-on-charge mode control, a based-on-time mode control, and a based-on-time-and-charge mode control. In the based-on-charge mode control, spike timing and spiking amount of an acid liquid are set for each lot of product. In the based-on-time mode control, the spike timing and the spiking amount of the acid liquid are set for each timing point. In the based-on-time-and-charge mode control, the spike timing and the spiking amount of an acid liquid are set for each lot of product and each timing point. Thereby, a concentration of the mixed acid liquid is controlled at a targetlevel.
Claims9
A method of spiking a mixed acid liquid in a reactor by using a computer to control a concentration of the mixed acid liquid, the concentration of the mixed acid liquid being controlled at a target level under a based-on-charge mode, a based-on-time mode, or a based-on-time-and-charge mode, the based-on-charge mode control comprising:
- providing a charge list including a plurality of lot numbers of product and a plurality of spiking amounts of a first acid liquid corresponding lot numbers of product;
- and
- introducing the spiking amounts of the first acid into the reactor in an order corresponding to the lot numbers of product;
- the based-on-time mode control comprising:
- providing a timing list including a plurality of timing points and a plurality of spiking amounts of a second acid liquid corresponding to the timing points;
- and
- introducing the spiking amounts of the second acid liquid into the reactor at the corresponding timing points;
- and the based-on-time-and-charge mode control comprising:
- providing a charge/timing list including spiking amounts and spike timing points;
- and
- introducing the spiking amounts of the first acid into the reactor based on the lot numbers of product and the spike timing points.
A method of spiking a mixed acid liquid in a reactor by using a computer to control a concentration of the mixed acid liquid, the concentration of the mixed acid liquid being controlled at a target level under an even-spike mode, wherein the even-spike mode control comprises:
- providing a timing list including interval settings and spiking amounts of a third acid, wherein the spiking amounts of the third acid are constant;
- and
- introducing the spiking amounts of the third acid into the reactor based on the interval settings.
A method of spiking a mixed acid liquid in a reactor by using a computer to control a concentration of the mixed acid liquid, the concentration of the mixed acid liquid being controlled at a target level under a based-on-charge mode, wherein the based-on-charge mode control comprises:
- providing a charge list including a plurality of lot numbers of product and a plurality of spiking amounts of a first acid liquid corresponding to lot numbers of product;
- and
- introducing the spiking amounts of the first acid into the reactor in an order corresponding to the lot numbers of product;
A method of spiking a mixed acid liquid in a reactor by using a computer to control a concentration of the mixed acid liquid, the concentration of the mixed acid liquid at a target level being controlled under a based-on-time mode, wherein the based-on-time mode control comprises:
- providing a timing list including a plurality of spike timing points and a plurality of spiking amounts of a second acid liquid corresponding to the spike timing points;
- and
- introducing the spiking amounts of the second acid liquid into the reactor at the corresponding spike timing points.
A method of spiking a mixed acid liquid in a reactor by using a computer to control a concentration of the mixed acid liquid, the concentration of the mixed acid liquid being controlled at a target level under a based-on-time-and-charge mode,
- wherein the based-on-time-and-charge mode control comprises:
- providing a charge/timing list including spiking amounts and spike timing points;
- and
- introducing the spiking amounts of the first acid into the reactor based on lot numbers of product and the spike timing points.
Dependencies are inferred from the claim text.