Process for sealing devices incorporating microstructures

A micromechanical device, comprising:

• a stator formed in a semiconductor material body;
• a rotor formed in the semiconductor material body, separated from the stator by a gap and movable with respect to the stator;
• and
• an elastomeric seal closing the gap.

A method, comprising:

• forming, in a semiconductor material body, a micromechanical structure, moveable with respect to the body, and separated therefrom by a gap;
• filling the gap with an elastomeric material;
• and
• cutting, from the semiconductor material body, a segment of the body comprising the micromechanical structure, the gap, and a portion of the body surrounding the structure.

A method, comprising:

• forming, in a semiconductor material body, a micromechanical structure, moveable with respect to the body, and separated therefrom by a gap;
• bridging the gap with an elastomeric material such that the gap is sealed without introducing elastomeric material into the gap;
• and
• cutting, from the semiconductor material body, a segment of the body comprising the micromechanical structure, the gap, and a portion of the body surrounding the structure.