Deposition of thin films using an infrared laser
AssigneeThe United States of America as represented by the Secretary of the Navy
InventorsDaniel Bubb, James Horwitz, John Callahan, Richard Haglund JR., Michael Papantonakis
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Abstract
This invention pertains to transfer of a solid target material onto a substrate by vaporizing the material by irradiating it with intense light of a resonant vibrational mode of the material and depositing the vaporized material on a substrate in a solid form.
Claims26
A method for transferring a target material from its starting condition in a solid form, through a vapor state, and depositing the material in a solid state on a substrate, the method comprising the steps of:
- (a) vaporizing the target starting material by means of irradiating the material with an intense, monochromatic light source where the light of a wavelength resonant with a vibrational mode of the starting material, as determined from the infrared absorption spectrum of the starting material, and
- (b) depositing the vaporized material on the substrate in the form of a solid coating.
A method for transferring a material onto a substrate comprising the steps of:
- (a) directing light of a wavelength resonant with a vibrational mode at a target starting material, the resonant wavelength being determined from absorption spectrum of the starting material,
- (b) vaporizing the target polymeric material, and
- (c) depositing the vaporized material on the substrate in solid form that is essentially same chemically as the starting polymeric material.
Dependencies are inferred from the claim text.