Electronic device having a getter used as a circuit element

An electronic device comprising:

• a substrate;
• a getter material having a surface exposed to a vacuum environment and having a thickness in the range from about 0.1 micron to about 10.0 microns, wherein said getter material comprises a metal selected from the group consisting of molybdenum, titanium, thorium, hafnium, zirconium, vanadium, yttrium, niobium, tantalum and combinations thereof;
• at least one circuit element, wherein said getter material forms at least a portion of said at least one circuit element, wherein said at least one circuit element is selected the group consisting of a conductor trace, an electron lens, an electric field shield, a resistor, a capacitor, an inductor, a Schottky contact, a gate metal contact, and combinations thereof;
• and
• at least one vacuum device electrically coupled to said at least one circuit element.

An electronic device comprising:

• at least one circuit element;
• means for maintaining a low pressure;
• and
• at least one vacuum device, wherein said means for maintaining a low pressure provides a means for electrically coupling said at least one circuit element to said at least one vacuum device.

A storage device, comprising:

• at least one electron emitter to generate an electron beam;
• a lens element focusing said electron beam forming a focused beam;
• a non-evaporable getter material having a surface exposed to a vacuum environment;
• at least one circuit element electrically coupled to said electron emitter, wherein said non-evaporable getter material forms a least a portion of said at least one circuit element;
• and
• a storage medium in close proximity to said at least one emitter, said storage medium having a storage area in one of a plurality of states to represent the information stored in that storage area;
• such that:
• an effect is generated when the focused beam strikes the storage area;
• the magnitude of the effect depends on the state of the storage area;
• and
• the information stored in the storage area is read by measuring the magnitude of the effect.

A method of manufacturing an electronic device comprising the steps of:

• forming at least one circuit element;
• creating a non-evaporable getter material disposed over a substrate, wherein said non-evaporable getter material forms at least a portion of said at least one circuit element;
• forming a least one vacuum device on a substrate;
• and
• coupling said at least one vacuum device electrically to said at least one circuit element.

A method of manufacturing an electronic device comprising the steps of:

• forming at least one circuit element, selected from the group consisting of a conductor trace, an electron lens, an electric field shield, a resistor, a capacitor, an inductor, a Schottky contact, a gate metal contact, and combinations thereof;
• creating a non-evaporable getter material disposed over a substrate, selected from the group consisting of molybdenum, titanium, thorium, hafnium, zirconium, vanadium, yttrium, niobium, tantalum and combinations thereof, wherein said non-evaporable getter material forms at least a portion of said at least one circuit element;
• forming a least one vacuum device on a substrate;
• and
• coupling said at least one vacuum device electrically to said at least one circuit element.

A method of using an electronic device comprising the steps of:

• activating a non evaporable getter material to maintain a reduced pressure;
• energizing at least one circuit element wherein said non-evaporable getter material forms at least a portion of said at least one circuit element;
• and
• energizing at least one vacuum device electrically coupled to said at least one circuit element.

An electronic device comprising:

• means for activating a non-evaporable getter material to maintain a reduced pressure;
• means for energizing at least one circuit element via said non-evaporable getter material;
• and
• means for energizing at least one vacuum device electrically coupled to said at least one circuit element.