Back to results
US 2003/0141769 A1Published application
Linear motor, stage apparatus, exposure apparatus, and device manufacturing apparatus
AssigneeCanon Kabushiki Kaisha
InventorHiroyoshi Kubo
Life of this patent
Estimating the term…
Abstract
In a linear motor, each arrayed coil unit (160) of a stator yoke (151) is divided into an upper coil (161) and lower coil (162). A cooling pipe (153) is interposed between the upper coil (161) and the lower coil (162).
Claims31
A linear motor having a stator and a movable element, comprising:
- a plurality of coil units arrayed in a moving direction of the movable element;
- and
- a first coolant channel through which a coolant flows,
- wherein each of said plurality of coil units has at least two partial coils divided into a direction different from the moving direction of the movable element, and
- the first coolant channel is so arranged as to run between said at least two partial coils which constitute each of said plurality of coil units.
2 more elements
Dependencies are inferred from the claim text.