US 2003/0141314 A1 · Chemical treating apparatus

Abstract

A chemical treating apparatus for performing a predetermined treatment of a principal surface of a substrate by delivering a treating solution thereto. The apparatus includes a treating solution delivery nozzle for delivering the treating solution to the principal surface of a substrate. The nozzle has a treating solution reservoir adjacent a tip end thereof for storing the treating solution. A temperature control device holds the treating solution reservoir to control the temperature of the treating solution in the treating solution reservoir through heat exchange with the treating solution.

Claims20

Dependent claims

A chemical treating apparatus for performing a predetermined treatment of a principal surface of a substrate by delivering a treating solution thereto, said apparatus comprising:

a treating solution delivery nozzle for delivering the treating solution to the principal surface of the substrate, said nozzle including a treating solution reservoir adjacent a tip end thereof for storing the treating solution;
and
temperature control means for holding said treating solution reservoir to control temperature of the treating solution in said treating solution reservoir through heat exchange with the treating solution.

Dependencies are inferred from the claim text.

Facts

Application

10/353,151Filed 28 Jan 2003

Priority

JP JP2002-2410331 Jan 2002

Published

31 Jul 2003

Term ends

Not estimatedThe source records don’t support an estimate.

Classification10 codes

H10P 72/0448
Apparatus for manufacture or treatment: apparatus for applying a liquid, a resin, an ink or the like
B05B 7/1666
The material to be sprayed being heated in a container: fixed to the discharge device
B05C 5/001
Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work: incorporating means for…
G03F 7/162
Coating processes; Apparatus therefor: coating on a rotating support, e.g. using a whirler or a spinner

Chemical treating apparatus

Life of this patent

Chemical treating apparatus

Life of this patent

Abstract

Claims20