Apparatus and method for inspecting working operations on circuit substrate, and system and method for fabricating electric circuit

A substrate-working-result inspecting method of inspecting a result of substrate working operations performed on a circuit substrate, comprising:

• an operating-procedure determining step of determining an operating procedure of an inspecting operation to be performed on said circuit substrate, on the basis of substrate working information of said substrate working operations performed on said circuit substrate;
• and
• an inspecting step of performing said inspecting operation of said circuit substrate, according to the determined operating procedure.

A substrate-working-result inspecting program executed by a computer, to inspect a result of substrate working operations performed on a circuit substrate, comprising:

• an operating-procedure determining step of determining an operating procedure of an inspecting operation to be performed on said circuit substrate, on the basis of substrate working information of said substrate working operations performed on said circuit substrate;
• and
• an inspecting step of controlling an inspecting apparatus provided to perform said inspecting operation, according to the determined operating procedure.

An electric-circuit fabricating system including at least one substrate working apparatus for performing predetermined substrate working operations on a circuit substrate, and a substrate-working-result inspecting apparatus for inspecting a result of said substrate working operations performed by said at least one substrate working apparatus, said substrate-working-result inspecting apparatus comprising:

• an inspecting device for performing an inspecting operation;
• and
• an inspection control device provided with (a) an operating-procedure determining portion for determining an operating procedure of said inspecting operation to be performed on said circuit substrate, on the basis of substrate working information of said substrate working operations performed on said circuit substrate by said at least one substrate working apparatus, and (b) an operation control portion for controlling said inspecting device according to the determined operating procedure.

An electric-circuit fabricating method including a substrate working step of performing predetermined substrate working operations on a circuit substrate, and a substrate-working-result inspecting step of inspecting a result of said substrate working operations, said substrate-working-result inspecting step comprising:

• an operating-procedure determining step of determining an operating procedure of an inspecting operation to be performed on said circuit substrate, on the basis of substrate working information of said substrate working operations performed on said circuit substrate in said substrate working step;
• and
• an inspecting step of performing said inspecting operation of said circuit substrate, according to the determined operating procedure.