Glass ceramic product with variably adjustable zero crossing of the CTE-T curve
AssigneeSchott Glas
InventorIna Mitra
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Abstract
The present invention relates to a process for producing a glass-ceramic with a defined zero crossing of the CTE-T curve (CTE: coefficient of thermal expansion), and glass-ceramic products produced using the process according to the invention.
Claims19
A process for producing a glass-ceramic which has a zero crossing of the CTE-T curve at a selected temperature TA±10° C., comprising the steps of providing a glass-ceramic or a green body of a glass-ceramic and ceramicizing in accordance with a ceramicizing program, the determination of which comprises the step of determining the CTE-T curve.
The process as claimed in one of the preceding claims, in which a glass-ceramic belonging to the Li2O—Al2O3—SiO2 system is provided.
A glass-ceramic product with a zero crossing of the CTE-T curve at a temperature TA±10° C., where TA is a temperature from 0 to 100° C.
A substrate for EUV lithography, comprising a glass-ceramic product with a zero crossing of the CTE-T curve at a temperature TA±10° C., where TA is a temperature from 0 to 100° C.
Dependencies are inferred from the claim text.