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AssigneeShinko Electric Co., Ltd.
InventorsYasuyoshi Kitazawa, Shigeto Suzuki, Toshio Miki, Susumu Nakagawa, Katsumi Yasuda, Kazunari Kitaji
Estimating the term…
A wafer mapping system according to the present invention is provided with an access port for transferring in and out a wafer, and performs a detection operation of an accommodated wafer to a cassette in which slots for accommodating and holding substantially level a plurality of inserted wafers are disposed in a plurality of tiers. The wafer mapping system comprises: a receiver that is fixed to a member facing the access port and formed of receiving elements arranged serially along a height direction of the cassette; and a transmitter that is disposed movable in a up and down direction of the cassette and transmits a signal toward a wafer accommodated in each of the slots of the cassette; wherein the receiver receives a signal transmitted from the transmitter, and thereby presence or absence and a state of a wafer accommodated in each of the slots of the cassette are detected. Thereby, with a simple system configuration, an accommodation state of the wafer in a FOUP can be accurately detected.
A wafer mapping system that is provided with an access port for transferring in and out a wafer, and performs a detection operation of an accommodated wafer to a cassette in which slots for accommodating and holding substantially level a plurality of inserted wafers are disposed in a plurality of tiers, comprising:
A wafer mapping system that is provided with an access port or transferring in and out a wafer, and performs a detection operation of an accommodated wafer to a wafer accommodation container in which slots for accommodating and holding substantially level a plurality of inserted wafers are disposed in a plurality of tiers, comprising:
Dependencies are inferred from the claim text.