System and method for laser beam expansion
AssigneeASML US, Inc.
InventorsWalter Augustyn, James Tsacoyeanes
Life of this patent
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Abstract
The present invention relates to a method and system for expanding a laser beam. An illumination system includes a horizontal reflective multiplexer and a vertical reflective multiplexer. The horizontal reflective multiplexer replicates the input beam along a first dimension to form a first multiplexed beam. The vertical reflective multiplexer replicates the first multiplexed beam along a second dimension to form a second multiplexed beam. In one example, the horizontal reflective multiplexer includes a first beam splitter, second beam splitter, and mirror. The vertical reflective multiplexer includes a beam splitter and mirror.
Claims20
A system for expanding a laser beam, comprising:
- a horizontal reflective multiplexer;
- and
- a vertical reflective multiplexer;
- wherein said horizontal reflective multiplexer replicates an input beam along a first dimension to form a first multiplexed beam;
- and said vertical reflective multiplexer replicates said first multiplexed beam along a second dimension to form a second multiplexed beam.
An illumination system for illuminating a reticle in a lithography tool, comprising:
- a horizontal reflective multiplexer;
- and
- a vertical reflective multiplexer;
- wherein said horizontal reflective multiplexer replicates an input beam along a first dimension to form a first multiplexed beam;
- and said vertical reflective multiplexer replicates said first multiplexed beam along a second dimension to form a second multiplexed beam that is emitted along an optical axis toward the reticle.
A method for expanding an input laser beam, comprising:
- (i) first replicating the input laser beam along a first dimension to form a first multiplexed beam having a first expanded footprint;
- and
- (ii) second replicating the first multiplexed beam along a second dimension to form a second multiplexed beam having a second expanded footprint.
Dependencies are inferred from the claim text.