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US 2003/0116850 A1Published application
Multi-level RF passive device
AssigneeInternational Business Machines Corporation
InventorsRichard P. Volant, Seshadri Subbanna, Robert A. Groves, John C. Malinowski, Kenneth J. Stein, Kevin S. Petrarca
Life of this patent
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Abstract
A passive electrical device includes a first electrical conductor, a second electrical conductor disposed over the first conductor; and a third electrical conductor connecting the first conductor to the second conductor. The said first, second and third conductors are disposed on a semiconductor substrate. The sheet resistivity of the first conductor is approximately equal to the sheet resistivity of the second conductor.
Claims15
A passive electrical device, comprising:
- a first electrical conductor;
- a second electrical conductor disposed over said first electrical conductor;
- a third electrical conductor connecting said first electrical conductor to said second electrical conductor, wherein said first, second and third conductors are disposed on a semiconductor substrate and wherein the sheet resistivity of said first electrical conductor is approximately equal to the sheet resistivity of said second electrical conductor.
An inductor, comprising:
- a semiconductor substrate;
- first, second and third electrical conductors provided on said substrate, wherein said first and second electrical conductors each has a thickness which is approximately equal, and wherein said semiconductor substrate comprises silicon.
Dependencies are inferred from the claim text.