Chemical vapor deposition vaporizer
AssigneePrimaxx, Inc.
InventorsRobert W. Grant, Larry D. McMillan
Life of this patent
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Abstract
A Chemical Vapor Deposition (CVD) vaporizer comprising: a liquid supply assembly having an environment supporting a liquid state for a plurality of precursor components of a liquid precursor blend; a venturi operative to atomize said liquid precursor blend; a vaporization chamber, located proximate to said liquid supply assembly and said venturi, having an environment supporting a vapor state for said plurality of precursor components; and a thermal barrier located between said liquid supply assembly and said vaporization chamber enabling preservation of a large temperature disparity between said liquid supply assembly and said proximately located vaporization chamber.
Claims45
A method of providing a vapor to a deposition chamber, the method comprising:
- maintaining a precursor blend in liquid form;
- misting said precursor blend;
- substantially simultaneously evaporating all precursor components of said misted precursor blend;
- and
- preserving said evaporated precursor components in vapor form after said evaporating, thereby providing a vaporized precursor blend.
The method of clam 1 wherein said misting comprises producing droplets having an average diameter of substantially 0.5 microns.
A chemical vapor deposition (CVD) vaporizer comprising:
- a liquid supply assembly having an environment supporting a liquid state for a plurality of precursor components of a liquid precursor blend;
- a venturi operative to atomize said liquid precursor blend;
- a vaporization chamber, located proximate to said liquid supply assembly and said venturi, having an environment supporting a vapor state for said plurality of precursor components;
- and
- a thermal barrier located between said liquid supply assembly and said vaporization chamber enabling preservation of a substantial temperature disparity between said liquid supply assembly and said proximately located vaporization chamber.
Dependencies are inferred from the claim text.